InGaN/GaN nanoLED Arrays as a Novel Illumination Source for Biomedical Imaging and Sensing Applications
Guidelines for the fabrication of nanoscale light-emitting diode arrays (i.e., nanoLED arrays) based on patterned gallium nitride (GaN) with Gentle Giant Jumbo Figures very small dimensions and pitches have been derived in this work.Several challenges during top-down LED array processing have been tackled involving hybrid etching and polymer-based